Technology Developed to Convert Glycerol into Key Semiconductor Material

A technology has been developed that converts glycerol, a by-product of biodiesel, into a raw material for high-value chemical materials used in semiconductor processes, garnering industry attention. Glycerol-based formates can be utilized as raw materials for functional chemicals employed in the cleaning stage after semiconductor CMP (Chemical Mechanical Planarization) processes to remove metal residues and fine particles.

As semiconductor processes become increasingly advanced, the importance of the cleaning stage following CMP is being highlighted. CMP is a core process that planarizes wafer surfaces through chemical and mechanical polishing. For highly integrated chips, post-processing cleaning technology is emerging as a critical factor in determining yield due to increased wiring density and precision requirements. In this process, organic chemicals like formates are used as functional additives to stabilize metal ions and control surface conditions. The demand for organic acids and their salts, such as formates, is gradually increasing to control residual metals after copper (Cu), cobalt (Co), and tungsten (W) wiring processes and to suppress surface oxidation.

The expansion of the AI semiconductor market is a recent trend leading to increased demand for CMP and post-processing cleaning materials. Highly integrated semiconductors like high-performance GPUs, AI accelerators, and high-bandwidth memory (HBM) require multi-layer wiring structures and fine patterns, leading to an increase in CMP process cycles and, consequently, the consumption of related chemicals. With the scale-up of AI semiconductor production, demand for related post-processing chemical materials is expected to grow steadily.

The industry views this technological development not merely as a hydrogen production technology but as a new raw material technology connecting the biofuel and semiconductor material industries. Previously, glycerol was recognized as a biodiesel by-product traded cheaply due to oversupply or incurring disposal costs. However, if this technology is commercialized, it has the potential to be re-evaluated as a raw material for functional chemical materials used in semiconductor processes. Formates are functional chemicals that can be used in post-CMP cleaning processes to stabilize metal ions and control surface conditions. If electronic-grade high-purity refining technology is secured, it could become a new growth engine in the semiconductor wet chemical materials market. To be applied in semiconductor processes, electronic-grade purification technology and long-term reliability verification are necessary.